RTS Standard Robot(KS) – Cleanroom Standard Single-Axis Robot

The RTS series is our single-axis robot specifically designed for cleanroom environments, featuring a fully enclosed stainless steel cover structure with low particle generation and high motion stability. Available with either ball screw drive or timing belt drive, offered in width options from 90mm to 180mm. Cleanroom rating reaches Class 100-1000, with repeatability up to ±0.005mm. Suitable for clean environment applications including semiconductor industry, FPD industry, medical automation, and optical inspection (AOI).

Key Features

• Cleanroom Compatible – Suitable for clean environments with cleanliness levels of Class 100–1000
• Fully Enclosed Design – Stainless steel cover provides excellent dust protection with low particle generation
• Dual Drive Options – Available in ball screw drive or timing belt drive configurations
• High Repeatability – Ball screw drive achieves repeatability up to ±0.005mm
• Multiple Width Options – Available in six widths: 90, 100, 120, 140, 150, and 180mm
• Long Stroke Options – Ball screw type maximum stroke 1250mm; belt drive type maximum stroke up to 3000mm

Full Specifications